• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Measuring device (100) comprising: - a first light source (110), for emitting an excitation beam (111) at an excitation wavelength; and - an excitation optical cavity (120), optically resonant at the excitation wavelength, and configured to receive the excitation beam; a second light source (130), for emitting a measurement beam (131) at a measurement wavelength; and - a mechanical element (150), mounted mobile around an elastic and / or elastically deformable return position, located both on the optical path of the excitation beam (120) in the optical excitation cavity and on the optical path of the measurement beam (131), and capable of being displaced and / or deformed by the excitation beam. One of the excitation beam and the measurement beam is capable of oscillating the mobile and / or deformable mechanical element (150). The measuring device can in particular be used as a gas sensor, or
    公开号:FR3088119A1
    申请号:FR1860198
    申请日:2018-11-06
    公开日:2020-05-08
    发明作者:Laurent Duraffourg；Jean-Marc Fedeli；Serge Gidon；Pierre Labeye
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    MEASURING DEVICE BASED ON OPTICAL MEASUREMENT IN AN OPTOMECHANICAL CAVITY
    DESCRIPTION
    TECHNICAL AREA
    The invention relates to the field of optical measurement devices, in particular, but not limited to, for measuring a gas concentration.
    PRIOR STATE OF THE ART
    Numerous optical devices are known in the prior art for measuring a gas concentration, based on the property of each gas to absorb light at very specific wavelengths (absorption lines).
    One can quote for example the technique known as CEAS, for the English “cavity enhanced absorption spectroscopy”, in which one injects into an optically resonant cavity a light beam at an absorption wavelength characteristic of a gas. When the cavity is filled with this gas, the light beam is partially absorbed by the gas in the cavity. The absorption is all the more effective as the light beam makes numerous back-and-forth movements in the cavity. The measurement of the light intensity transmitted by the cavity gives information on the concentration of the gas in the cavity.
    A drawback of this technique lies in particular in the fact that the laser source providing the light beam has random variations in modes which make the device unstable and noisy. Different solutions have been proposed to increase stability.
    For example, in the so-called OA-CEAS technique, for English “off-axis CEAS”, intentionally avoiding resonant coupling to a single cavity mode is avoided. For this, the laser beam injected into the cavity is offset relative to the axis of the cavity, and follows a trajectory tracing an elliptical pattern on the mirrors which delimit the cavity. The light intensity is measured at the outlet of the cavity, integrated over the entire elliptical pattern. This technique is described for example by P. Malara et al., In the article “Sensitivity enhancement of off-axis ICOS using wavelength Modulation”, Appl Phys B, Lasers and Optics (2012).
    As a variant, part of the resonant photons of the cavity are used as feedback on the laser source, to force an emission at the exact resonant frequencies of the cavity. This technique is described for example by D. Romanini et al., In the article “Fast, low-noise, mode-by-mode, cavity-enhanced absorption spectroscopy by diode-laser self-locking”, Appl Phys B, Lasers and Optics (2005).
    Each of these solutions, however, forms a complex and bulky device.
    An objective of the present invention is to provide a measuring device, making it possible in particular to measure a gas concentration, and capable of offering both a reduced bulk and a great simplicity of production and adjustment.
    STATEMENT OF THE INVENTION
    This objective is achieved with a measurement device comprising:
    a first light source, configured to emit an excitation light beam with at least one emission peak centered on an excitation wavelength;
    an optical excitation cavity, optically resonant at said excitation wavelength, and configured to receive as input said excitation light beam;
    a second light source, configured to emit a measurement light beam, with an emission peak centered on a measurement wavelength; and a movable and / or deformable mechanical element, mounted movable around an elastic and / or elastically deformable return position, situated both on the optical path of the excitation light beam in the excitation optical cavity and on the optical path of the measurement light beam, and capable of being displaced and / or deformed by the excitation light beam;
    one of the excitation light beam and the measurement light beam being able to oscillate the mobile and / or deformable mechanical element.
    Preferably, it is the excitation light beam which is capable of oscillating the mobile and / or deformable mechanical element, thanks to a light intensity greater than that of the excitation light beam and in particular by a phenomenon of self-oscillation (described later).
    The excitation optical cavity and the mobile and / or deformable mechanical element together form an opto-mechanical cavity, in which an optical phenomenon and a mechanical phenomenon interact with each other. In particular, the excitation light beam confined in the excitation optical cavity is able to move and / or deform the mobile and / or deformable mechanical element according to an oscillating movement.
    The interaction between an optical phenomenon and a mechanical phenomenon enables a measurement to be made on the mechanical phenomenon (measurement of the displacement or deformation of the mobile and / or deformable mechanical element) rather than on the optical phenomenon directly (measurement of a characteristic of the excitation light beam). This eliminates the stability defects mentioned in the introduction, without making the device excessively complex, nor significantly increasing its size.
    According to the invention, the measurement on the mechanical phenomenon is carried out using the measurement light beam, distinct from the excitation light beam. This optical measurement has the advantage of offering high precision for a small footprint. In addition, the optical characteristics of the light beam used for the measurement are thus decorrelated from the optical characteristics of the light beam absorbed by the gas, which makes it possible to carry out detection in ranges of wavelengths for which particularly efficient detectors are available. . In particular, the light beam absorbed by the gas (excitation light beam) can be located in the infrared medium, which is the most interesting spectral range for gas spectrometry, while the light beam used for the measurement (beam measurement light) can be located in the visible, in a spectral range which does not impose the use of a cooled detector of the MCT type (detector based on Tellurium of Mercury-Cadmium) to measure a signal.
    Finally, optical measurement proves to be particularly advantageous in variants of the invention in which the mechanical element mounted mobile and / or deformable belongs both to the excitation optical cavity and to an optical measurement cavity receiving the beam. luminous measurement.
    The measuring device according to the invention offers a better detection limit and stability than CEAS type systems based on a simple resonant cavity, while having a smaller footprint and less complexity in comparison with the more complex systems presented in the introduction.
    Preferably, the measurement wavelength is situated on the visible and near infrared spectrum, between 380 nm and 1 pm, and the excitation wavelength is situated outside the visible and near infrared spectrum.
    Advantageously, the excitation light beam is capable of oscillating the mobile and / or deformable mechanical element, and the measurement light beam has a light intensity at least twice that of the excitation light beam.
    The excitation wavelength advantageously corresponds to the maximum of a resonance peak of the excitation optical cavity at equilibrium, the excitation optical cavity being said to be at equilibrium when the movable mechanical element and / or deformable is in a central position between two extreme positions of its oscillating movement.
    The device according to the invention may further comprise an optical cavity called measurement, optically resonant at said measurement wavelength and configured to receive as input the measurement light beam, with the mobile and / or deformable mechanical element which belongs to both the excitation optical cavity and the measurement optical cavity.
    The measurement wavelength can then be located on a resonance peak of the optical measurement cavity at equilibrium, the optical measurement cavity being said to be at equilibrium when the movable and / or deformable mechanical element is in a central position between two extreme positions of its oscillating movement.
    The measurement wavelength can in particular be located on a slope of said resonance peak.
    Advantageously, a first face of the movable and / or deformable mechanical element is optically reflective at the excitation wavelength, and a second face of the movable and / or deformable mechanical element, opposite to said first face, is optically reflecting at the measurement wavelength, with the excitation optical cavity which extends on the side of the first face of the movable and / or deformable mechanical element and the optical measurement cavity which extends on the side of the second face of the movable and / or deformable mechanical element.
    The excitation optical cavity and the optical measurement cavity can overlap at least partially, with the mobile and / or deformable mechanical element which extends in a region located both inside the optical cavity. excitation and inside the optical measurement cavity.
    Preferably, the movable and / or deformable mechanical element extends over an area between 100 * 100 pm 2 and 10 * 10 mm 2 .
    At least one region inside the excitation optical cavity can be adapted to receive a gaseous or liquid medium, with the excitation wavelength which corresponds to an absorption wavelength characteristic of a gas or a predetermined liquid, so that in operation, the presence of said predetermined gas or liquid in the optical excitation cavity modifies the oscillation of the movable and / or deformable mechanical element. Preferably, the movable and / or deformable mechanical element then extends inside a vacuum housing.
    As a variant, the mobile and / or deformable mechanical element may comprise a receiving zone for receiving one or more particles, with the mobile and / or deformable mechanical element which is configured so that in operation, its oscillation is modified by the presence said particles on the receiving area.
    The invention also covers a system comprising an interferometer one of the arms of which comprises the optical measurement cavity.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The present invention will be better understood on reading the description of exemplary embodiments given purely by way of non-limiting indication, with reference to the appended drawings in which:
    - Figure 1 schematically illustrates a first embodiment of a measuring device according to the invention;
    - Figures 2A and 2B illustrate the link, in an optically resonant cavity, between the position of the bottom mirror and the resonance wavelength;
    - Figures 3A to 3C illustrate the positioning of the excitation and measurement wavelengths, relative to the respective spectral responses of the optical cavities of the device of Figure 1;
    - Figures 4A and 4B illustrate the light intensity, respectively the phase, of the measurement light beam emerging from the device of Figure 1;
    - Figure 5 schematically illustrates a variant of the embodiment of Figure 1;
    - Figures 6 to 8 schematically illustrate different variants of a second embodiment of a measuring device according to the invention;
    - Figure 9 schematically illustrates a third embodiment of a measuring device according to the invention;
    - Figure 10 schematically illustrates a system comprising a measuring device according to the invention and means for carrying out a measurement on the measuring light beam emerging from said device;
    - Figures 11A to 11D and 12A to 12C respectively illustrate two methods of producing a measuring device according to the invention.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    FIG. 1 schematically illustrates a first embodiment of a measuring device 100 according to the invention, here more particularly forming a gas sensor for measuring a concentration of a predetermined gas.
    The device 100 is shown in a sectional view in the plane (xOz) of an orthonormal reference frame (Oxyz).
    The device 100 here comprises:
    - a first light source 110;
    - A first optical cavity 120, called optical excitation cavity;
    - a second light source 130; and
    a second optical cavity 140, called the optical measurement cavity.
    The first light source 110 is formed of a laser source, with an emission spectrum which has one or more emission peak (s) each centered on a respective excitation wavelength λ Ε , where λ Ε which corresponds to an absorption line characteristic of the gas whose concentration is to be measured. An excitation wavelength λ Ε is preferably between 1 pm and 15 pm, and more preferably between 3 pm and 12 pm (medium infrared). This range of wavelengths groups the wavelengths useful for identifying many gaseous compounds, in particular alkanes, volatile organic compounds, sulfur or nitrogen oxides, etc. For example, we have λ Ε = 4.23 pm, which corresponds to one of the absorption wavelengths of carbon dioxide. According to other variants, an excitation length λ Ε can be located in the ultraviolet, for example to detect ozone (at 254 nm). The first light source 110 consists for example of a quantum cascade laser (QCL, for English “quantum cascade laser”). The light beam emitted by the first light source 110 is called the excitation light beam,
    111. In use, the excitation light beam 111 propagates along the axis (Oz), up to the excitation optical cavity 120.
    The optical excitation cavity 120 is a Fabry-Perot cavity, here a linear cavity aligned along the axis (Oz) and delimited by an input mirror 121 and a bottom mirror. It has a length of a few centimeters along the axis (Oz). Preferably, the quality factor of the optical excitation cavity 120 is greater than or equal to 10 4 and even 10 5 , thanks to high quality mirrors (reflectivity greater than or equal to 98% for example). For example, without absorption by a gaseous medium in the optical excitation cavity 120, a quality factor of approximately 150,000, and a fineness of approximately 1,000, these values varying slightly as a function of the absorption. The excitation optical cavity 120 is optically resonant at the excitation wavelength λ Ε . The bottom mirror is formed here of an oscillating mechanical element 150, reflecting at the excitation wavelength λ Ε . In use, the excitation light beam 111 performs several back and forth movements in the excitation optical cavity 120.
    The second light source 130 is formed by a laser source emitting in the visible or near infrared spectrum, at wavelengths between 380 nm and 1 μm for which there are photo-detectors having excellent detection performance. The emission spectrum of the second light source 130 has in particular an emission peak centered on a so-called measurement wavelength, λ ΰ , with for example λ 0 = 830 nm. The light beam emitted by the second light source 130 is called the measurement light beam, 131. In use, the measurement light beam 131 propagates along the axis (Oz), up to the optical measurement cavity 140, where it goes back and forth several times before emerging from it. The measurement light beam 131 is preferably a continuous signal.
    The optical measurement cavity 140 is a Fabry-Perot cavity, here a linear cavity aligned along the axis (Oz), and delimited by an input mirror 141, and a bottom mirror. Preferably, the quality factor of the optical measurement cavity 140 is greater than or equal to 10 4 , thanks to high quality mirrors (reflectivity greater than or equal to 95% for example). For example, there is a quality factor of approximately 73,000, and a fineness of approximately 30. The optical measurement cavity 140 is optically resonant at the measurement wavelength λ ΰ . The bottom mirror is formed here by the oscillating mechanical element 150, also reflecting at the measurement wavelength λ ΰ .
    The oscillating mechanical element 150 serves as a bottom mirror for each of these two cavities 120 and 140. It extends between the two optical cavities 120 and 140. The oscillating mechanical element 150 is elastically deformable, capable of being mechanically deformed in response to the application of an external mechanical force, and to return to its initial shape upon cessation of the application of said force. At rest, it preferably extends in a plane (xOy) orthogonal to the axis (Oz), with on each side one of the two optical cavities 120 and 140. In response to the application of a mechanical force oriented along the axis (Oz), the oscillating mechanical element 150 curves in the direction of one or other of the optical cavities 120 and 140. The oscillating mechanical element 150 thus forms a movable mechanical element and / or deformable according to the invention, able to deform under the effect of a pressure force, and to return to its initial shape when it is no longer subjected to this pressure force. In particular, the oscillating mechanical element 150 is able to deform by bending, under the effect of a pressure force oriented along the axis (Oz).
    The oscillating mechanical element 150 here consists of a membrane coated with one or more reflective coatings. Preferably, the reflective coating (s) each extend over the entire surface of the membrane, in a plane parallel to the plane (Oxy). Each reflective coating can consist of a thin layer of metal, for example silver or gold. The oscillating mechanical element 150 comprises for example two reflective coatings, respectively covering one and the other face of the membrane, and forming a bottom mirror respectively for the optical excitation cavity and the optical measurement cavity. As a variant, the same reflective coating can form both the bottom mirror of the excitation optical cavity and the bottom mirror of the optical measurement cavity. The membrane, for its part, consists for example of silicon nitride. The oscillating mechanical element 150 has, in a plane parallel to the plane (Oxy), a surface of between 100 * 100 pm 2 and a few mm 2 , for example a square of 1 mm 2 . Its thickness (according to (0z)) is between a few tens of nanometers and a few micrometers, for example 50 nm. The oscillating mechanical element 150 is mounted integral with a peripheral support 151, and stretched inside said peripheral support 151 with a biaxial stress in tension of the order of 100 MPa. The oscillating mechanical element 150 can thus oscillate around an equilibrium position, like a drum. Such a dimensioning of the oscillating mechanical element 150 makes it possible to reach mechanical resonance frequencies of several MHz. The peripheral support 151 is preferably anti-reflective treated at the excitation wavelength, so as to minimize its impact on the excitation light beam.
    In the example illustrated in FIG. 1, the oscillating mechanical element 150 is mounted integral with the peripheral support 151, by means of a peripheral connection 152.
    The peripheral connection may consist of a washer, or of a series of arms, extending between the oscillating mechanical element 150 and the peripheral support 151 by surrounding the oscillating mechanical element 150. The peripheral connection 152 is optional. It can be formed rigid.
    According to a variant of the invention, the peripheral connector 152 is elastically deformable, while the oscillating mechanical element 150 forms a rigid element. In particular, the peripheral connector 152 is able to deform mechanically in response to the application of an external mechanical force, and to return to its initial shape when the application of said force stops. At rest, the peripheral connection 152 preferably extends in a plane (xOy) orthogonal to the axis (Oz), with on each side one of the two optical cavities 120 and 140. When a mechanical force oriented along the 'axis (Oz) is exerted on the oscillating mechanical element 150, the latter moves in translation along the axis (Oz) by driving with it the peripheral connection 152 which is deformed. The elasticity of the peripheral connection 152 makes it possible to return the oscillating mechanical element 150 to its initial position, when said mechanical force ceases to be exerted on the oscillating mechanical element 150. The oscillating mechanical element 150 thus forms a mobile mechanical element and / or deformable according to the invention, able to move in translation along the axis (Oz), around an elastic return position. The elastic return position corresponds to the position of the oscillating mechanical element 150 along the axis (Oz), in the absence of application to the latter of an external mechanical force oriented along the axis (Oz) . According to other variants, the oscillating mechanical element 150 can be both elastically deformable and movable in translation around an elastic return position.
    The optical measurement cavity and the optical excitation cavity extend together inside an enclosure 101 comprising at least two sealed housings.
    A first housing 122 is located inside the optical excitation cavity 120, and configured to receive a gaseous medium on which it is desired to carry out a concentration measurement. In Figure 1, there is shown schematically two openings 123A 123B in the enclosure 101, respectively forming an inlet and an outlet for the arrival of a gaseous medium in the housing 122, respectively the outlet of the gaseous medium outside the housing 122.
    A second housing 142 is evacuated, and extends both in the optical excitation cavity and in the optical measurement cavity by framing the oscillating mechanical element 150. The second housing 142 forms a vacuum housing of the oscillating mechanical element. The vacuum here designates a medium at a pressure of less than 10 -5 bar and even less than or equal to 10 -6 bar (with 1 bar equivalent to 10 5 Pa). The oscillating mechanical element being placed under vacuum, it can form a mechanical oscillator with a high quality factor of up to 10 4 to 10 5 .
    Here, the housing 142 extends over the entire optical measurement cavity 140, and over part of the optical excitation cavity 120, being separated from the housing 122 by a sealing plate 143. The sealing plate makes an insulation between the two housings 121, 142. It is transparent to the wavelength of the excitation light beam 111. Preferably, it is treated anti-reflective at this same wavelength.
    The vacuuming of the oscillating mechanical element is not an essential element of the invention, and variants can be implemented, in which the optical measurement cavity and the optical excitation cavity are both completely filled by the medium to be studied.
    In order to better understand the following, we have illustrated in FIGS. 2A and 2B, the link between the position of the oscillating mechanical element 150, and the position of the resonance peaks of the excitation optical cavity 120.
    FIG. 2A schematically illustrates the optical excitation cavity 120, for two positions of the oscillating mechanical element 150, respectively at a distance d and at a distance d + δζ from the input mirror 121. The two positions of l mechanical oscillating element 150 are denoted respectively 150 (d) and 150 (d + δζ).
    FIG. 2B illustrates the spectral position of the resonance of the optical excitation cavity, when the oscillating mechanical element 150 is located at a distance d from the input mirror 121, respectively d + δζ. The abscissa axis is an optical frequency in Hz, the wavelength and the optical frequency being linked by the speed of light in a vacuum. The ordinate axis is a transfer function, without unit, corresponding to a density of energy reflected or transmitted by the optical cavity, and normalized to the unit at the maximum of reflection or transmission. Resonance results in a peak, called resonance peak, on the transfer function of the optical cavity as a function of frequency. It can be seen in FIG. 2B that the spectral position of the resonance depends on the position of the oscillating mechanical element 150. The two positions of the resonance peak are noted respectively 12 (d) and 12 (d + <5z).
    In operation, the excitation light beam 111 is confined in the excitation optical cavity 120, where it forms a standing wave which exerts on the oscillating mechanical element 150 a radiation pressure. This radiation pressure forms an external mechanical force oriented along the axis (Oz), able to elastically deform and / or move the oscillating mechanical element around an elastic return position. In the example illustrated in FIG. 2, the radiation pressure slightly displaces the mechanical element oscillating along the axis (Oz). This displacement very slightly modifies the resonance wavelength of the excitation optical cavity 120. The wavelength of the excitation light beam 111 no longer exactly corresponds to the resonance wavelength of the optical cavity d excitation 120, the radiation pressure exerted on the oscillating mechanical element 150 decreases, so that it returns to its initial position, where it will again be subjected to a high radiation pressure. The oscillating mechanical element thus performs a mechanical oscillation movement at a frequency f lt called self-oscillation. If the excitation light beam 111 is continuous, the frequency of the self-oscillation is fixed by the geometric characteristics of the excitation optical cavity 120 and of the oscillating mechanical element. If the excitation light beam 111 is amplitude modulated, corresponds to the modulation frequency of the beam 111. An excitation light beam 111 amplitude modulated allows for example to excite only certain mechanical modes of interest of the element oscillating mechanical 150. In any event, is generally greater than 500 kHz, for example 1 MHz.
    The same phenomenon occurs when the radiation pressure slightly deforms the oscillating mechanical element, bending it along the axis (Oz).
    To avoid generating too high a radiation pressure in the optical measurement cavity, capable of disturbing the oscillation of the oscillating mechanical element generated by the excitation light beam 111, the light power of the measurement light beam 131 is chosen much lower than that of the excitation light beam 111. In this way, the radiation pressure exerted on the oscillating mechanical element 150 by the measurement light beam 131 is negligible, compared to the radiation pressure exerted by the light beam 111. The ratio of the light power of the excitation light beam divided by the light power of the measurement light beam is greater than or equal to 2, and even greater than or equal to 10. For example, the light beam of excitation injected into the excitation optical cavity 120 has a light power P E = lOpVF, and the measurement light beam injected into the optical measurement cavity 140 has a light power P D = IpV /. In the following, we will talk about light intensity or light power, these two quantities being linked.
    In operation, the oscillating mechanical element 150 is therefore set in oscillation, under the effect of a radiation pressure exerted by the excitation light beam 111 confined in the excitation optical cavity 120.
    The distance between the input mirror 121 of the excitation optical cavity 120 and the input mirror 141 of the optical measurement cavity 140 is fixed. Consequently, the oscillation of the oscillating mechanical element 150 results in an oscillation of the length of the optical measurement cavity 140, and therefore an oscillation of the spectral position of the resonance peaks of the latter. Said oscillation of the spectral position of the resonance peaks results in an amplitude modulation on the measurement light beam transmitted or reflected by the measurement optical cavity 140, emerging from the latter after having gone there and back several times.
    In operation, and in the presence of carbon dioxide in the housing 122, the carbon dioxide partially absorbs the excitation light beam circulating in the excitation optical cavity, with an absorption rate which depends on the concentration of dioxide of carbon. This absorption has the consequence that the radiation pressure exerted on the oscillating mechanical element is lower. Consequently, the amplitude of the oscillations of the oscillating mechanical element 150 decreases, which results in a variation in the characteristics of the measurement light beam emerging from the measurement optical cavity 140 after having made several passages therein. In particular, the modulation amplitude and the phase of the measurement light beam emerging from the measurement optical cavity are modified.
    The measurement light beam emerging from the measurement optical cavity 140 in particular verifies the following condition:
    3sÎ3 C R Q opt αδζ SIK = —— '° TT with ôI R the peak-to-peak amplitude of the light intensity modulation of the measurement light beam emerging from the measurement optical cavity 140, δζ the displacement of the element oscillating mechanical 150, g the optomechanical coupling coefficient connecting the optical resonance in the excitation optical cavity and the mechanical displacement of the oscillating mechanical element,
    Q opt the optical quality factor of the optical excitation cavity, v R the optical resonance frequency of the optical excitation cavity, and
    C R = , Rmax lRmin | e contrast of the measurement light beam emerging from the fRmax measurement optical cavity 140.
    In FIGS. 3A to 3C, the abscissa axis corresponds to a wavelength, and the ordinate axis corresponds to a transfer function.
    Advantageously, and as illustrated in FIG. 3A, the excitation wavelength λ Ε corresponds to the central wavelength of a resonance peak of the excitation optical cavity 120 at equilibrium, in l absence of absorption of the excitation light beam by a gas in the excitation optical cavity 120. The excitation optical cavity 120 is said to be at equilibrium when the oscillating mechanical element 150 is in a central position between the two extreme positions of its oscillating movement.
    As illustrated in FIG. 3B, advantageously, the measurement wavelength λ 0 is located on a slope of a resonance peak of the measurement optical cavity
    140 at equilibrium, in the absence of absorption of the excitation light beam by a gas in the excitation optical cavity 120. The optical measurement cavity 140 is said to be at equilibrium when the oscillating mechanical element 150 is in a central position between the two extreme positions of its oscillating movement. This positioning of the measurement wavelength λ 0 relative to the resonance peak of the measurement optical cavity 140 makes it possible to maximize the variation of the measurement light beam generated by the movement of the oscillating mechanical element 150. By placing more particularly in an almost rectilinear zone of the resonance peak, at mid-height of the peak, one also ensures the linearity of the relationship between the displacement and / or the deformation of the oscillating mechanical element 150, and variations in modulation and phase amplitude on the measurement light beam emerging from the measurement optical cavity.
    In FIG. 3B, the two extreme positions of the measurement wavelength λ 0 are shown by vertical lines relative to the resonance peak, during the oscillation movement of the oscillating mechanical element 150, and in l absence of absorption of the excitation light beam by the gas. Formally, the measurement wavelength λ 0 remains fixed, and it is the resonance peak which moves. For reasons of readability of the figure, a fixed resonance peak has been shown, and a measurement wavelength which moves. The oscillation of the spectral position of the resonance peak results in an amplitude modulation on the measurement beam emerging from the measurement optical cavity 140. Said modulation has a peak-to-peak amplitude Ai.
    Similarly, FIG. 3C illustrates by vertical lines the two extreme positions of the measurement wavelength λ 0 relative to the resonance peak, during the oscillation movement of the oscillating mechanical element 150, and after absorption of part of the power of the excitation light beam by the gas. The measurement light beam emerging from the measurement optical cavity 140 this time has a peak-to-peak amplitude A 2 , with A 2 <Ai.
    In FIG. 4A, the light power of the measurement light beam emerging from the measurement optical cavity 140 is shown, as a function of time, and for different concentrations of carbon dioxide in the housing 122. The abscissa axis is a time, in seconds. The ordinate axis is a light power, in nW. The peak-to-peak amplitude of the light power oscillations varies from approximately 5 nW, for a concentration of 1 ppb (part per billion), to approximately 60 nW, for a concentration of 1 ppm (part per million).
    In FIG. 4B, the phase of the measurement light beam emerging from the measurement optical cavity 140 is represented, as a function of time, and for different concentrations of carbon dioxide in the housing 122. The abscissa axis is a time , in seconds. The ordinate axis is a phase, in degree of angle. The peak-to-peak amplitude of the phase oscillations varies from approximately 0.4 °, for a concentration of 1 ppb (part per billion), to approximately 3 °, for a concentration of 1 ppm (part per million).
    It can therefore be seen that the carbon dioxide concentration can be deduced from a measurement of light power and / or of optical phase, as a function of time, on the measurement light beam emerging from the measurement optical cavity 140.
    The measuring device according to the invention makes it possible to obtain a very satisfactory detection limit, for example 400 ppt (part per trillion) for carbon dioxide, and for an integration time of one second (considering noise lpW / s measurement detector).
    The measuring device 100 according to the invention also has the advantage that the light beam to be measured is distinct from the light beam absorbed by the gas. It is therefore possible to fix the respective wavelengths of one and the other according to distinct criteria. In particular, the wavelength of the measurement light beam can be fixed as a function of the detection performance of known photo-detectors, without it being necessary to remain within wavelength ranges comprising absorption lines characteristics of a gas to be detected.
    A phenomenon is described below which amplifies the effect of the absorption of the excitation light beam, in the measurement device 100 according to the invention. Indeed, this absorption also has the effect of reducing the optical forces which are applied on average to the oscillating mechanical element 150, which consequently modifies the equilibrium position of the latter, that is to say the central position of its oscillating movement.
    The shift in the equilibrium position of the oscillating mechanical element results in a shift between the wavelength of the maximum of the resonance peak of the optical excitation cavity 120, and the excitation wavelength λ Ε of the excitation light beam. This shift therefore has the effect of further contributing to reducing the optical forces exerted on the oscillating mechanical element 150 by the excitation light beam.
    In the measurement optical cavity 140, the measurement light beam has a measurement wavelength λ 0 situated on the slope of a resonance peak of said cavity. The shift of the equilibrium position of the oscillating mechanical element results in a shift of the measurement wavelength λ 0 along this slope. This offset also contributes to amplifying the impact of the absorption of the excitation light beam, on the characteristics of the measurement light beam emerging from the measurement optical cavity.
    Advantageously, the first light source is slaved in wavelength using feedback, by causing a portion of the photons of the excitation light beam resonating in the excitation optical cavity to return to said light source. The feedback is implemented at constant time intervals, for example once per second. The offsets of the equilibrium position of the oscillating mechanical element are then regularly canceled, before they harm the proper functioning of the measuring device according to the invention. Alternatively, these offsets can be canceled by slightly moving the mirrors of the excitation optical cavity. According to another variant, it is possible to cancel the effect produced by these shifts by adjusting a transmission power of the excitation light beam.
    FIG. 5 illustrates a variant 500 of the embodiment of FIG. 1. In this variant, the housing 542 for evacuating the oscillating mechanical element has a reduced volume, and extends inside a thick element 543. The thick element 543 is transparent at the measurement wavelength λ ΰ . It has a face covered by the input mirror 541 of the optical measurement cavity 540. The opposite face is attached to the housing 522 to receive the medium to be analyzed. In this embodiment, the vacuumed volume is limited to a small volume surrounding the oscillating mechanical element, which simplifies the vacuuming operation.
    According to another variant, not shown, the optical excitation cavity is traversed by a tube capable of receiving a medium to be studied, the remainder of the optical excitation and measurement cavities being placed under vacuum.
    FIG. 6 illustrates a second embodiment of a measurement device 600 according to the invention, in which the optical measurement cavity 620 and the optical excitation cavity 640 are combined, and each delimited by the two mirrors 641, 621 both highly reflective at the measurement wavelength and at the excitation wavelength. Here, the first light source 610 extends from the side of one of said mirrors, and the second light source 630 extends from the side of the other of said mirrors.
    The oscillating mechanical element 650 is transparent both at the measurement wavelength λ 0 and at the excitation wavelength λ Ε . It consists for example of the membrane as described above, without the reflective coatings. The transmission rate at each of these two wavelengths is greater than or equal to 95%, and even greater than or equal to 99%.
    The oscillating mechanical element 650 being transparent to the wavelength of the excitation light beam, it is not or only slightly subjected to the radiation pressure exerted by the latter.
    In operation, the excitation light beam 611 forms a standing wave in the optical measurement cavity 620. The standing wave is defined by nodes, where its variation in amplitude is zero, and bellies, where its variation amplitude is maximum. The position of the bellies is defined in the absence of absorption of the excitation light beam in the optical measurement cavity 620. The oscillating mechanical element 650 is between a node and a belly and preferably close to the exit mirror 621, where the exit mirror is the mirror situated on the side opposite the mirror by which the measurement light beam 631 is injected into the cavities 620, 640.
    The oscillating mechanical element 650 is thus subjected, in operation, to an optical force due this time to the electric field gradient of the standing wave. This optical force makes it possible to set the oscillating mechanical element in motion, according to a self-oscillation movement similar to that described above. The self-oscillation of the oscillating mechanical element is therefore generated, as in the first embodiment, by an optical force exerted by the excitation light beam confined in the excitation optical cavity. As in the first embodiment, the oscillation of the oscillating mechanical element 650 is a function of the optical force which is applied to the latter. This optical force itself depends on the light power of the excitation light beam in the excitation optical cavity 620. This light power itself depends on the extent to which the excitation light beam is absorbed in the optical cavity excitation 620, and therefore of a gas concentration in the excitation optical cavity 620.
    In operation, the measurement light beam 631 forms a standing wave in the measurement optical cavity 640 (merged here with the excitation cavity 620). In order to optimize the interactions between the measuring light beam 631 and the oscillating mechanical element 650, the wavelength of the latter is placed in the slope of the spectral response of the cavities 620, 640. The displacement and / or the deformation of the oscillating mechanical element 650 locally modifies the refractive index “seen” by the measuring light beam 631 in the optical measuring cavity 640. The displacement and / or deformation of the oscillating mechanical element 650 therefore modifies the effective length of the measuring optical cavity 640, which corresponds to a modification of its resonant frequency. Thus, as in the first embodiment, the mechanical oscillation of the oscillating mechanical element results in variations in the optical properties of the measurement light beam 631 which emerges out of the measurement optical cavity 640 after having made several rounds there. and returns (in particular variations in its optical phase and / or its modulation amplitude). Measuring the optical properties of the measurement light beam 631 which emerges from the measurement optical cavity 640 therefore gives information on the oscillation of the oscillating mechanical element 650, which ultimately depends on the gas concentration in the optical cavity of excitement 620.
    As in the embodiment of FIG. 1, we find:
    a housing 622 for receiving the gaseous medium to be studied, extending here between the mirror 621 and a sealing plate 643; and
    a housing 642 placed under vacuum, receiving the oscillating mechanical element 650, and extending here between the sealing plate 643 and the mirror 641.
    FIG. 7 illustrates a first variant in which the excitation optical cavity
    720 and the measurement optical cavity 740 partially overlap, without being confused. They continue to share at least the same end mirror, and the oscillating mechanical element. The measuring device 700 here comprises three mirrors, arranged parallel to each other:
    a first end mirror 721, on the side of the first light source 710, highly reflecting at the measurement wavelength and at the excitation wavelength;
    - a second end mirror 741, on the side of the second light source 730, highly reflecting at the measurement wavelength; and
    - an intermediate mirror 724, which extends between the second end mirror 741 and the oscillating mechanical element 750, transparent at the measurement wavelength and highly reflective at the excitation wavelength.
    The optical excitation cavity 720 is delimited by the first end mirror
    721 and the intermediate mirror 724. The optical measurement cavity 740 is delimited by the first end mirror 721 and the second end mirror 741. This arrangement makes it possible to independently adjust the length of the excitation optical cavity 720 and of the measuring optical cavity 740. This makes it easier to position the oscillating mechanical element 750 at a belly of the excitation light beam confined in the excitation optical cavity, and a belly of the beam measurement light in the measurement optical cavity.
    FIG. 8 illustrates a second variant 800 in which the excitation optical cavity and the optical measurement cavity are combined, and have a V shape (two linear portions inclined relative to one another). The optical cavities are folded up using an intermediate mirror 860, highly reflecting at the measurement wavelength and at the excitation wavelength. Here, the intermediate mirror is placed directly behind the oscillating mechanical element 850, in the hollow of the V.
    Many other variants can be implemented, for example by combining the variants of FIGS. 7 and 8.
    Examples of a single excitation wavelength have been described above. As a variant, the first light source can emit an excitation light beam having several emission peaks, each centered on a respective excitation wavelength (where each excitation wavelength can correspond to a length d respective absorption wave of a gas). According to another variant, the first light source can successively emit different excitation light beams each having an emission peak centered on a respective excitation wavelength. It is thus possible to detect the concentrations of different gases, and thus to determine the composition of a gaseous medium. The resonance wavelength of the excitation cavity can be adjustable (by adjusting the length of said cavity, in particular), so as to be optically resonant in turn at different excitation wavelengths. Alternatively, the excitation optical cavity may have several resonance wavelengths corresponding to the different excitation wavelengths. The mirrors of the excitation optical cavity must be adapted to efficiently reflect each of said excitation wavelengths. These mirrors can consist of a metallic deposit, for example of gold, or of a stack of dielectric layers.
    The measuring device according to the invention can also be used simply to detect the presence of a particular component in a gaseous medium, without necessarily determining its concentration.
    According to other variants, the excitation optical cavity comprises a heating element capable of vaporizing a liquid, to carry out a measurement relating to a vaporized liquid medium.
    In addition or alternatively, the measuring device according to the invention can be used to implement visible or ultraviolet spectroscopy, depending on the wavelength of the excitation light beam. Here again, the absorption of the excitation light beam is linked to the excitation of modes of vibration or rotation of the molecules, and makes it possible to identify the nature of said molecules.
    FIG. 9 illustrates a third embodiment of a measuring device 900 according to the invention, this time forming a mass spectrometer.
    In this embodiment, the oscillating mechanical element is formed of a simple membrane 950, one of the faces of which forms a receiving zone for receiving one or more particles. The excitation optical cavity 920 and the optical measurement cavity 940 are both placed under vacuum, that is to say under a pressure less than 10 -5 bar and even less than or equal to 10 -6 bar. We can therefore overcome a sealing plate to separate the two cavities.
    In operation, the membrane 950 is made to oscillate by the excitation light beam 911 confined in the excitation optical cavity 920, in the same way as in the embodiment of FIG. 1. The membrane 950 thus forms an assembly oscillating. A particle beam 91 is injected into the excitation optical cavity 920, in the direction of the membrane 950. The density of particles in the beam 91 is sufficiently low so that one continues to consider that the optical excitation cavity 920 and the measuring optical cavity 940 are evacuated. When a particle is retained on the membrane 950, the latter together form a new oscillating assembly, of mass greater than that of the oscillating assembly previously constituted by the membrane 950 alone. The oscillation of the oscillating assembly is therefore modified, in particular its mechanical frequency of oscillation. The measurement light beam which emerges from the measurement optical cavity 940 after having made several round trips there has characteristics representative of the oscillation of the oscillating assembly. Measuring these characteristics therefore makes it possible to obtain information on the particle (s) attached to the membrane 950. The measuring device 900 according to the invention thus forms a mass spectrometer. The membrane can be covered with an absorption layer having a particular chemical affinity with certain species to be measured. In this third embodiment, the membrane advantageously consists of graphene, preferably a monolayer graphene. This embodiment makes it possible to produce a mass spectrometer offering both a large capture section (surface of the membrane) and a high mass sensitivity.
    In this embodiment, the excitation wavelength λ Ε advantageously corresponds to the central wavelength of a resonance peak of the excitation optical cavity at equilibrium, this time defined in the absence of absorption of particles by the membrane 950. In the same way, the measurement wavelength λ 0 is advantageously located on a slope of a resonance peak of the optical cavity for measurement at equilibrium, this time defined in the absence of absorption of particles by the membrane 950.
    In this embodiment, the first light source 910 can emit a light beam in the visible, since it is not limited to wavelengths corresponding to absorption lines of a gas. However, it remains advantageous that said first light source is configured to emit a light beam in the infrared medium. If, in addition, it has an adjustable emission power, it can be used to emit a so-called cleaning light beam. The cleaning light beam takes the form of a signal of high light power, preferably impulse, and spectrum located in the middle infrared. When it arrives on the membrane 950, it induces a heating which makes it possible to activate the desorption of the particles previously adsorbed by the membrane.
    The membrane can be excited in several of its mechanical modes, in order to have access to various information relating to the deposited particle, in particular its mass, its shape, its position on the membrane, etc. Preferably, a mechanical mode of frequency / j is excited using an excitation light beam modulated in amplitude at said frequency fi.
    Many variants of this embodiment can be implemented, by combination of each of the embodiments and variants of a gas sensor as described above.
    The invention also covers a measurement system, comprising a measurement device according to the invention and means for performing a measurement on the measurement light beam emerging from the measurement optical cavity after having made several round trips there.
    In a first embodiment, not shown, said means for performing a measurement on the measurement light beam consist simply of a photodetector, for measuring a light intensity as a function of time.
    In a second embodiment illustrated in FIG. 10, the system 10 includes a Michelson type interferometer. The measurement light beam 1031 emitted by the second light source 1030 is separated into two sub-beams by a separating blade 104. The separating blade 104 directs each of the two sub-beams towards a respective arm 102, 103 of the interferometer. A first arm 102 of the interferometer comprises the optical measurement cavity 1040 of a measurement device according to the invention.
    The sub-beam emerging from the optical measurement cavity 1040 after having made several round trips there is then combined with the sub-beam having circulated on the second arm 103 of the interferometer. The combination of the two sub-beams produces an interference signal 105 which is received by a photo-detector 106, for example a photodiode on silicon sensitive to 830 nm. We can thus follow, as a function of time, the phase difference between the phase of the measurement light beam entering the measurement optical cavity 1040 and the phase of the same beam emerging from the measurement optical cavity 1040 after having gone there several times. and returns.
    Either of these two measurement systems may further comprise calculation means for processing the signal supplied by the photo-detector, and deducing therefrom information relating for example to a concentration in a gaseous medium or liquid (vaporized), or to a particle deposited on a receiving area.
    In the various embodiments detailed above, the oscillating mechanical element is made to oscillate using the excitation light beam. As a variant, it can be set in oscillation using the measurement light beam, then having, at the input of the measurement optical cavity, an amplitude modulation and a sufficient light power to generate the oscillation. The excitation light beam then exerts on the oscillating mechanical element a constant force, which generates a bias on the oscillating movement of the latter.
    According to other variants, the measurement device does not include an optical measurement cavity. The measurement light beam is simply reflected on the oscillating mechanical element. Information on the movement of the oscillating mechanical element is obtained by a simple phase shift measurement, using an interferometer in which one of the arms receives the measurement light beam reflected on the oscillating mechanical element.
    According to other variants, the oscillating mechanical element can form a bottom mirror for the excitation optical cavity and the optical measurement cavity, with these two cavities which extend on the same side of the oscillating mechanical element.
    In the above examples, the oscillating mechanical element consists of a membrane, whether or not coated with a reflective coating. The invention is not however limited to this example. The oscillating mechanical element can for example consist of a beam, a tuning fork etc. In any event, the oscillating mechanical element has dimensions of the same order of magnitude as the spatial modes of the excitation light beam and of the measurement light beam, preferably slightly lower in order to have uniform light powers at the surface of the oscillating mechanical element.
    The invention is not limited to optical cavities formed by flat mirrors, the latter being able to comprise flat and / or concave, and / or convex, and / or more complex shaped mirrors.
    In the various examples detailed above, the movable and / or deformable mounted mechanical element extends inside a housing placed under vacuum. However, the invention is not limited to devices having this characteristic, and also covers variants in which the mechanical element mounted mobile and / or deformable does not extend into a housing placed under vacuum. The movable and / or deformable mechanical element is then surrounded by a gaseous medium to be analyzed, which can fill both the optical measurement cavity and the optical excitation cavity.
    Examples of methods for producing a measuring device according to the invention are described below.
    In FIGS. 11A to 11D, a method for producing a measurement device 1100 is illustrated, in which the oscillating mechanical element 1150 forms a bottom mirror both for the optical excitation cavity and for the optical measurement cavity. In this embodiment:
    - successively depositing, on a first silicon substrate 11A: a first Bragg mirror 1121, and a layer 1125 transparent to the wavelength of the excitation light beam. The first silicon substrate 11A is then locally etched to form the side walls of the excitation optical cavity 1120 (FIG. 11A);
    a thermal oxide serving as an etching stop layer 1155, a layer of silicon nitride 1156 (S13N4), and a stack of layers forming a Bragg mirror 1157 are successively deposited on a second silicon substrate 11B: then the stack is etched on the rear face up to the etching stop layer 1155 to form the side walls of the optical measurement cavity 1140 (FIG. 11B);
    - a third Bragg mirror 1141 is produced on a glass substrate 11C transparent in the visible (FIG. 11C); and
    - We glue on each other the three stacks thus produced. The etching stop layer 1155, the silicon nitride layer 1156, and the Bragg mirror 1157 together form the oscillating mechanical element according to the invention.
    The etching step on the rear face implements for example deep reactive ion etching or wet etching with TMAH. Is carried out, in conjunction with the etching step on the rear face, an etching to pierce openings in the excitation otic cavity so as to let pass a gaseous or liquid medium to be studied.
    The bonding steps differ depending on whether they involve two silicon substrates (in this case direct bonding is well suited), or glass substrate and a silicon substrate (in this case vacuum bonding, eutectic bonding, or even a metal bonding is well suited).
    Bragg mirrors consist for example of alternating layers of silicon nitride (SîN) and silicon oxide (S1O2).
    In FIGS. 12A to 12C, a method of producing a measurement device 1200 is illustrated, in which the excitation optical cavity and the optical measurement cavity are superimposed. In this embodiment:
    - a thin layer of silicon 1251 etched on the periphery and which will form the oscillating mechanical element 1250, a sacrificial oxide layer 1252, and a stack of layers forming a mirror of Bragg 1221, then the stack is etched on the rear face to form the side walls of the optical cavities, and the sacrificial oxide layer 1252 is etched to release the oscillating mechanical element 1250 (FIG. 12A);
    - a second Bragg mirror 1241 is produced on a glass substrate 12B transparent in the visible (FIG. 12B); and
    - We glue one on the other the two stacks thus produced.
    The etching of the stack on the rear face implements different etching techniques for etching the different layers of the stack, in particular lithography, oxide etching, deep reactive ion etching and chemical etching. The etching of the sacrificial layer is a steam etching with hydrofluoric acid.
    If necessary, a third mirror can be added, when the two optical cavities are not merged but superimposed.
    Again, the Bragg mirrors preferably consist of alternating layers of silicon nitride (SiN) and silicon oxide (SiCh).
    权利要求:
    Claims (14)
    [1" id="c-fr-0001]
    1. Measuring device (100; 500; 600; 700; 800; 900; 1100; 1200) comprising:
    a first light source (110; 610; 710; 910), configured to emit an excitation light beam (111; 611; 711; 911) with at least one emission peak centered on an excitation wavelength (A £ ); and an optical excitation cavity (120; 620; 720; 920; 1120), optically resonant at said excitation wavelength, and configured to receive said excitation light beam as input;
    characterized in that the measuring device further comprises:
    a second light source (130; 630; 730; 1030), configured to emit a measurement light beam (131; 631; 731; 931; 1031), with an emission peak centered on a measurement wavelength ( λ ΰ ); and a movable and / or deformable mechanical element (150; 550; 650; 750; 850;
    950; 1150; 1250), mounted movable around an elastic and / or elastically deformable return position, located both on the optical path of the excitation light beam (120; 620; 720; 920; 1120) in the optical cavity excitation and on the optical path of the measuring light beam (131; 631;
    731; 931; 1031), and able to be moved and / or deformed by the excitation light beam;
    and in that one of the excitation light beam and the measurement light beam is capable of oscillating the mobile and / or deformable mechanical element (150; 550; 650; 750; 850; 950; 1150; 1250).
    [2" id="c-fr-0002]
    2. Device (100; 500; 600; 700; 800; 900; 1100; 1200) according to claim 1, characterized in that the measurement wavelength (λ ΰ ) is located on the visible and near infrared spectrum, between 380 nm and 1 pm, and in that the excitation wavelength (A £ ) is located outside the visible and near infrared spectrum.
    [3" id="c-fr-0003]
    3. Device (100; 500; 600; 700; 800; 900; 1100; 1200) according to claim 1 or 2, characterized in that the excitation light beam (111; 611; 711; 911) is capable of placing in oscillation the movable and / or deformable mechanical element (150; 550; 650; 750; 850; 950; 1150; 1250), and in that the measuring light beam (131; 631; 731; 931; 1031) has a light intensity at least two times lower than that of the excitation light beam.
    [4" id="c-fr-0004]
    4. Device (100; 500; 600; 700; 800; 900; 1100; 1200) according to any one of claims 1 to 3, characterized in that the excitation wavelength (Λ £ ) corresponds to the maximum a resonance peak of the excitation optical cavity at equilibrium, the excitation optical cavity (120; 620; 720; 920; 1120) being said to be at equilibrium when the movable mechanical element and / or deformable (150; 550; 650; 750; 850; 950; 1150; 1250) is in a central position between two extreme positions of its oscillating movement.
    [5" id="c-fr-0005]
    5. Device (100; 500; 600; 700; 800; 900; 1100; 1200) according to any one of claims 1 to 4, characterized in that it further comprises a so-called measuring optical cavity (140; 540 ; 640; 740; 940; 1040; 1140), optically resonant at said measurement wavelength (λ ΰ ) and configured to receive as input the measurement light beam (131; 631; 731; 931; 1031), and in that the movable and / or deformable mechanical element (150; 550; 650; 750; 850; 950; 1150; 1250) belongs to both the excitation optical cavity (120; 620; 720; 920; 1120 ) and to the optical measurement cavity (140; 540; 640; 740; 940; 1040; 1140).
    [6" id="c-fr-0006]
    6. Device (100; 500; 600; 700; 800; 900; 1100; 1200) according to claim 5, characterized in that the measurement wavelength (λ ΰ ) is located on a resonance peak of the cavity equilibrium measurement optics, the measurement optical cavity (140; 540; 640; 740; 940; 1040; 1140) being said to be at equilibrium when the movable and / or deformable mechanical element (150; 550; 650 ; 750; 850; 950; 1150; 1250) is in a central position between two extreme positions of its oscillating movement.
    [7" id="c-fr-0007]
    7. Device (100; 500; 600; 700; 800; 900; 1100; 1200) according to claim 6, characterized in that the measurement wavelength (λ ΰ ) is located on a slope of said resonance peak.
    [8" id="c-fr-0008]
    8. Device (100; 500; 900; 1100) according to any one of claims 5 to 7, characterized in that a first face of the movable and / or deformable mechanical element (150; 550; 950; 1150) is optically reflective at the excitation wavelength (Λ £ ), and in that a second face of the movable and / or deformable mechanical element (150; 550; 950; 1150), opposite to said first face , is optically reflective at the measurement wavelength (λ ΰ ), with the excitation optical cavity (120; 920; 1120) which extends on the side of the first face of the movable mechanical element and / or deformable and the optical measurement cavity (140; 540; 940; 1040; 1140) which extends on the side of the second face of the movable and / or deformable mechanical element.
    [9" id="c-fr-0009]
    9. Device (600; 700; 800; 1200) according to any one of claims 5 to 7, characterized in that the excitation optical cavity (620; 720) and the optical measurement cavity (640; 740) are cover at least partially, and in that the movable and / or deformable mechanical element (650; 750; 850; 1250) extends in a region located both inside the optical excitation cavity and at inside the optical measurement cavity.
    [10" id="c-fr-0010]
    10. Device (100; 500; 600; 700; 800; 900; 1100; 1200) according to any one of claims 1 to 9, characterized in that the movable and / or deformable mechanical element (150; 550; 650 ; 750; 850; 950; 1150; 1250) extends over an area between 100 * 100 pm 2 and 10 * 10 mm 2 .
    [11" id="c-fr-0011]
    11. Device (100; 500; 600; 700; 800; 1100; 1200) according to any one of claims 1 to 10, characterized in that at least one region (122; 522; 622) inside the excitation optical cavity (120; 620; 720; 1120) is adapted to receive a gaseous or liquid medium, and in that the excitation wavelength (Â £ ) corresponds to a wavelength of characteristic absorption of a predetermined gas or liquid, so that in operation, the presence of said predetermined gas or liquid in the optical excitation cavity modifies the oscillation of the mobile and / or deformable mechanical element (150 ; 550; 650; 750; 850; 1150; 1250).
    [12" id="c-fr-0012]
    12. Device (100; 500; 600; 700; 800; 1100; 1200) according to claim 11, characterized in that the movable and / or deformable mechanical element (150; 550; 650; 750; 850; 1150; 1250 ) extends inside a vacuum housing (142; 542).
    [13" id="c-fr-0013]
    13. Device (900) according to any one of claims 1 to 10, characterized in that the movable and / or deformable mechanical element (950) comprises a receiving zone for receiving one or more particles, and in that the movable and / or deformable mechanical element (950) is configured so that in operation, its oscillation is modified by the presence of said particles on the receiving zone.
    [14" id="c-fr-0014]
    14. System (10) comprising a measuring device according to any one of claims 1 to 13, characterized in that it comprises an interferometer one of the arms of which (102) comprises the optical measurement cavity (1040).
    类似技术:
    公开号 | 公开日 | 专利标题
    EP3650836A1|2020-05-13|Measurement apparatus based on optical detection of the motion of an opto-mechanical cavity
    EP2930506B1|2019-05-08|Detection device with helmholtz differential acoustic resonator
    EP0291366B1|1991-08-07|Optical fibre michelson interferometer and its use, especially in temperature measurement
    EP2473885B1|2013-05-29|Device for atomic clock
    EP2473886B1|2013-05-29|Device for atomic clock
    FR2963101A1|2012-01-27|PARTICULATE DETECTOR AND METHOD OF MAKING SAME
    EP2315001B1|2016-08-03|Gas detection device
    EP3527967B1|2020-08-12|Acousto-optic detector with opto-mechanical coupling
    EP0942261B1|2005-02-02|Procedure and device to measure the bottom of craters on a surface of a sample
    EP3494381B1|2020-05-20|Absorption cavity with input and output waveguides for a biological or chemical sensor
    FR2672739A1|1992-08-14|LASER, RING LASER GYROSCOPE AND METHOD FOR SUPPRESSING DEAXATED MODES OF LIGHT WAVE PROPAGATION IN A CAVITY.
    EP1306941A1|2003-05-02|Optical cavity in resonance within a continuous frequency range
    FR2849922A1|2004-07-16|Support device for chromophore component e.g. chemical molecule, has anti-reflective layer formed as pile of layers on face of support, where layer has refractive index nearly equal to square root of refractive index of support
    EP1941261A1|2008-07-09|Electromagnetic wave sensor with tetrahertz bandwidth
    WO2020148671A1|2020-07-23|Resonant optical cavity system with optical feedback, suitable for detecting traces of gas by raman spectroscopy
    WO2000009978A1|2000-02-24|Apparatus for measuring a light beam wavelength
    FR3052872A1|2017-12-22|OPTICAL REFLECTOR RESONANT TO MULTIPLE THIN LAYERS OF DIELECTRIC MATERIALS, OPTICAL SENSOR AND LASER AMPLIFICATION DEVICE COMPRISING SUCH A REFLECTOR
    CH703410A1|2012-01-13|Device for enabling double passage of laser beam into gas cell of coherent-population-trapping atomic clock, has photodetector controlling optical frequency of laser beam and/or controlling temperature of gas cell
    FR3067812A1|2018-12-21|PHOTOACOUSTIC GAS DETECTION DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE
    FR2772910A1|1999-06-25|Hard disc surface flatness measuring apparatus
    FR2708733A1|1995-02-10|Device for optical detection of the vibrations of a microstructure, with stabilised operating point
    FR2904434A1|2008-02-01|OPTICAL DEVICE FOR IMAGING OR CHARACTERIZING A MATERIAL SAMPLE IN MICROSCOPY OR SPECTROSCOPY IN REFLECTION IN THE TERAHERTZ SPECTRAL DOMAIN
    CH703111A1|2011-11-15|Device for enabling double passage of laser beam into gas cell of coherent-population-trapping atomic clock, has polarizer arranged between output of laser beam and splitter to protect laser diode from retro reflections emitted by elements
    WO1990007250A1|1990-06-28|Microphone with interferometric detection of acoustic pressure
    同族专利:
    公开号 | 公开日
    US20200141805A1|2020-05-07|
    FR3088119B1|2020-11-06|
    EP3650836B1|2021-12-29|
    US10845242B2|2020-11-24|
    EP3650836A1|2020-05-13|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US5195374A|1989-08-30|1993-03-23|Schlumberger Industries Limited|Sensor systems|
    US20140043614A1|2012-06-28|2014-02-13|Technion Research And Development Foundation Ltd.|On-fiber optomechanical cavity based sensor|
    DE19643342A1|1996-10-21|1998-04-30|Bosch Gmbh Robert|Method and device for measuring a physical quantity|
    US9243998B2|2011-07-07|2016-01-26|Honeywell International Inc.|Resonant photo acoustic system|
    GB2508908B|2012-12-14|2017-02-15|Gen Electric|Resonator device|CN109870449B|2019-02-25|2021-11-26|京东方科技集团股份有限公司|Gas monitoring device, system and method and cabinet|
    CN111951670A|2020-08-14|2020-11-17|华中科技大学|Display, lighting and wearable electronic equipment with gas-sensitive function and preparation method|
    法律状态:
    2019-11-29| PLFP| Fee payment|Year of fee payment: 2 |
    2020-05-08| PLSC| Publication of the preliminary search report|Effective date: 20200508 |
    2020-11-30| PLFP| Fee payment|Year of fee payment: 3 |
    2021-11-30| PLFP| Fee payment|Year of fee payment: 4 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1860198A|FR3088119B1|2018-11-06|2018-11-06|MEASURING DEVICE BASED ON OPTICAL MEASUREMENT IN AN OPTO-MECHANICAL CAVITY.|FR1860198A| FR3088119B1|2018-11-06|2018-11-06|MEASURING DEVICE BASED ON OPTICAL MEASUREMENT IN AN OPTO-MECHANICAL CAVITY.|
    US16/674,080| US10845242B2|2018-11-06|2019-11-05|Measuring device based on an optical measurement in an opto-mechanical cavity|
    EP19207049.8A| EP3650836B1|2018-11-06|2019-11-05|Measurement apparatus based on optical detection of the motion of an opto-mechanical cavity|
    [返回顶部]